ECLIPSE-CHIPS: GOALI: Diagnostics and Physics of Plasmas in Modern Industrial CCP Etch Too — NSF Award to University of California
This award is made in response to Dear Colleague Letter 24-130, as part of the ECosystem for Leading Innovation in Plasma Science and Engineering (ECLIPSE) interdisciplinary program. The award supports a joint Grant Opportunities for Academic Liaison with Industry (GOALI) effort by the University of California - Los An
| Award title | ECLIPSE-CHIPS: GOALI: Diagnostics and Physics of Plasmas in Modern Industrial CCP Etch Too |
|---|---|
| Award ID | 2511879 |
| Awardee | University of California-Los Angeles |
| City | LOS ANGELES |
| State | CA |
| Amount obligated | $600,000 |
| Principal investigator | Walter Gekelman |
| Program | OFFICE OF MULTIDISCIPLINARY AC |
| Start date | 09/01/2025 |
| Abstract | This award is made in response to Dear Colleague Letter 24-130, as part of the ECosystem for Leading Innovation in Plasma Science and Engineering (ECLIPSE) interdisciplinary program. The award supports a joint Grant Opportunities for Academic Liaison with Industry (GOALI) effort by the University of California - Los Angeles and Lam Research Corporation that includes a collaboration with Sandia National Laboratories. Each year the worldwide industry produces over a trillion computer chips, or abo |
| Source | NSF Awards |
$799/mo
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