ECLIPSE-CHIPS: Plasma-Produced Materials to Investigate Laser-Produced Plasmas for Microel — NSF Award to University of California
This award is made in response to Dear Colleague Letter 24-130, as part of the ECosystem for Leading Innovation in Plasma Science and Engineering (ECLIPSE) interdisciplinary program. This grant supports the research looking to advance photolithography, a technology that is critical for the large-scale manufacturing of
| Award title | ECLIPSE-CHIPS: Plasma-Produced Materials to Investigate Laser-Produced Plasmas for Microel |
|---|---|
| Award ID | 2512062 |
| Awardee | University of California-Riverside |
| City | RIVERSIDE |
| State | CA |
| Amount obligated | $532,000 |
| Principal investigator | Lorenzo Mangolini |
| Program | AM-Advanced Manufacturing |
| Start date | 09/01/2025 |
| Abstract | This award is made in response to Dear Colleague Letter 24-130, as part of the ECosystem for Leading Innovation in Plasma Science and Engineering (ECLIPSE) interdisciplinary program. This grant supports the research looking to advance photolithography, a technology that is critical for the large-scale manufacturing of microelectronics. Photolithography is used to define the exceedingly small integrated circuits that enable the large computing power of devices such as smartphones and laptop compu |
| Source | NSF Awards |
$799/mo
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