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ENG-SEMICON: Manufacturing USA: Plasticity-Induced Cu-Cu Bonding for Scalable 3D Chip Inte — NSF Award to SUNY at Binghamton (NY,

Recent advancements in artificial intelligence (AI) are driving an unprecedented need for higher interconnect density in 3D-stacked semiconductor chips, with interconnect pitches scaling less than 1 micrometer. However, such ultrafine-scales cannot be achieved using current microbump technology, necessitating the devel

Award titleENG-SEMICON: Manufacturing USA: Plasticity-Induced Cu-Cu Bonding for Scalable 3D Chip Inte
Award ID2436980
AwardeeSUNY at Binghamton
CityBINGHAMTON
StateNY
Amount obligated$290,000
Principal investigatorJunghyun Cho
ProgramAM-Advanced Manufacturing
Start date07/01/2025
AbstractRecent advancements in artificial intelligence (AI) are driving an unprecedented need for higher interconnect density in 3D-stacked semiconductor chips, with interconnect pitches scaling less than 1 micrometer. However, such ultrafine-scales cannot be achieved using current microbump technology, necessitating the development of novel approach such as ‘bumpless’ hybrid bonding that enables simultaneous copper-to-copper (Cu-Cu) and dielectric-dielectric (SiO2-SiO2) bonding. Despite its potential f
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