Equipment: MRI: Track 1 Acquisition of a 50 kV, High-Throughput Electron Beam Lithography — NSF Award to Vanderbilt University (TN
This Major Research Instrumentation award supports the Vanderbilt Institute of Nanoscale Science and Engineering (VINSE) with the acquisition of a state of the art 50-kV Elionix ELS-BODEN electron beam lithography (EBL) tool that will be housed within the cleanroom, a shared-use facility. This facility also serves univ
| Award title | Equipment: MRI: Track 1 Acquisition of a 50 kV, High-Throughput Electron Beam Lithography |
|---|---|
| Award ID | 2405054 |
| Awardee | Vanderbilt University |
| City | NASHVILLE |
| State | TN |
| Amount obligated | $965,000 |
| Principal investigator | Joshua Caldwell |
| Program | Major Research Instrumentation |
| Start date | 01/01/2025 |
| Abstract | This Major Research Instrumentation award supports the Vanderbilt Institute of Nanoscale Science and Engineering (VINSE) with the acquisition of a state of the art 50-kV Elionix ELS-BODEN electron beam lithography (EBL) tool that will be housed within the cleanroom, a shared-use facility. This facility also serves universities such as Fisk University (HBCU), Tennessee State University (HBCU), Belmont University, Middle Tennessee State University, University of Tennessee Space Institute, and Aust |
| Source | NSF Awards |
$799/mo
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