← NSFGrants
HomeNsf Awards

Equipment: MRI: Track 2 Acquisition of Electron Beam Lithography System for Multidisciplin — NSF Award to University of California

The ability to create nanoscale structures and materials has enabled groundbreaking advances in various science and nanotechnology applications. Electron beam lithography (EBL) is one of the most reliable and important techniques for creating ultrasmall nanostructures and nanomaterials. Many ongoing projects in the STE

Award titleEquipment: MRI: Track 2 Acquisition of Electron Beam Lithography System for Multidisciplin
Award ID2408857
AwardeeUniversity of California-Irvine
CityIRVINE
StateCA
Amount obligated$1,409,000
Principal investigatorHo Wai Howard Lee
ProgramMajor Research Instrumentation
Start date09/01/2024
AbstractThe ability to create nanoscale structures and materials has enabled groundbreaking advances in various science and nanotechnology applications. Electron beam lithography (EBL) is one of the most reliable and important techniques for creating ultrasmall nanostructures and nanomaterials. Many ongoing projects in the STEM disciplines have an urgent need for the proposed instrument. The long-range objective in acquiring the proposed equipment is to form a nanofabrication hub at the University of Ca
SourceNSF Awards

🔍 Search all NSF awards →