I-Corps: Translation Potential of Chemical Process Simulation for Advanced Semiconductor D — NSF Award to North Carolina State Uni
This I-Corps project investigates the commercial potential of a software package and database system to simulate and predict chemical reactions during semiconductor manufacturing. In current semiconductor manufacturing, forming nanoscale patterns requires hundreds of consecutive, precisely controlled chemical reactions
| Award title | I-Corps: Translation Potential of Chemical Process Simulation for Advanced Semiconductor D |
|---|---|
| Award ID | 2534684 |
| Awardee | North Carolina State University |
| City | RALEIGH |
| State | NC |
| Amount obligated | $50,000 |
| Principal investigator | Gregory Parsons |
| Program | I-Corps |
| Start date | 09/15/2025 |
| Abstract | This I-Corps project investigates the commercial potential of a software package and database system to simulate and predict chemical reactions during semiconductor manufacturing. In current semiconductor manufacturing, forming nanoscale patterns requires hundreds of consecutive, precisely controlled chemical reactions to deposit and etch thin films. As devices shrink and evolve in structure, developing new processes is time intensive and costly. Process optimization often proceeds through trial |
| Source | NSF Awards |
$799/mo
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