MRI: Track 1 Acquisition of Atomic Layer Deposition (ALD) for the Davidson Foundation Clea — NSF Award to Board of Regents, NSHE,
This Major Research Instrumentation (MRI) grant will enable the acquisition of a high-rate Atomic Layer Deposition (ALD) system for research, education, and semiconductor workforce development in the Northern Nevada region. ALD is a critical technology used to deposit thin film oxides and nitrides required for leading-
| Award title | MRI: Track 1 Acquisition of Atomic Layer Deposition (ALD) for the Davidson Foundation Clea |
|---|---|
| Award ID | 2511980 |
| Awardee | Board of Regents, NSHE, obo University of Nevada, Reno |
| City | RENO |
| State | NV |
| Amount obligated | $1,105,668 |
| Principal investigator | Jeongwon Park |
| Program | Special Initiatives |
| Start date | 10/15/2025 |
| Abstract | This Major Research Instrumentation (MRI) grant will enable the acquisition of a high-rate Atomic Layer Deposition (ALD) system for research, education, and semiconductor workforce development in the Northern Nevada region. ALD is a critical technology used to deposit thin film oxides and nitrides required for leading-edge devices in fields as diverse as semiconductors, quantum technology, mechanical engineering, chemistry, and biology. The ALD will be located in the new Davidson Foundation Clea |
| Source | NSF Awards |
$799/mo
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