NSF TTP-T: Advancing Solvent-Free Metal-Imidazolate Extreme Ultraviolet (EUV) Photoresist — NSF Award to Johns Hopkins University
This project is funded through the NSF Translation to Practice (TTP) program, which supports efforts to translate research discoveries into practical tools that benefit communities, industry, and society. This NSF TTP-T award supports research to develop an environmentally friendly manufacturing process for making adva
| Award title | NSF TTP-T: Advancing Solvent-Free Metal-Imidazolate Extreme Ultraviolet (EUV) Photoresist |
|---|---|
| Award ID | 2552985 |
| Awardee | Johns Hopkins University |
| City | BALTIMORE |
| State | MD |
| Amount obligated | $1,200,000 |
| Principal investigator | Michael Tsapatsis |
| Program | Translation to Practice |
| Start date | 06/01/2026 |
| Abstract | This project is funded through the NSF Translation to Practice (TTP) program, which supports efforts to translate research discoveries into practical tools that benefit communities, industry, and society. This NSF TTP-T award supports research to develop an environmentally friendly manufacturing process for making advanced computer chips that power smartphones, computers, and artificial intelligence (AI) systems. Current chip fabrication methods rely on the use of hazardous chemical liquids that |
| Source | NSF Awards |
$799/mo
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