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SBIR Phase II: Physics-Guided AI Platform for Accelerating Extreme Ultraviolet (EUV) Mask — NSF Award to EXIGENT SOLUTIONS, INC. (

The broader impact/commercial potential of this Small Business Innovation Research (SBIR) Phase II project is to strengthen domestic semiconductor manufacturing capacity at a time of global supply-chain realignment and unprecedented demand for advanced chips. By providing an intelligent software platform that shortens

Award titleSBIR Phase II: Physics-Guided AI Platform for Accelerating Extreme Ultraviolet (EUV) Mask
Award ID2528393
AwardeeEXIGENT SOLUTIONS, INC.
CityAUBREY
StateTX
Amount obligated$1,168,940
Principal investigatorPaul Lou
ProgramSBIR Phase II
Start date09/01/2025
AbstractThe broader impact/commercial potential of this Small Business Innovation Research (SBIR) Phase II project is to strengthen domestic semiconductor manufacturing capacity at a time of global supply-chain realignment and unprecedented demand for advanced chips. By providing an intelligent software platform that shortens design-to-manufacturing cycles, the project supports faster delivery of high-performance, energy-efficient electronics that underpin cloud computing, artificial intelligence (AI),
SourceNSF Awards

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