High-κ gate dielectrics: Current status and materials properties considerations
High-κ gate dielectrics: Current status and materials properties considerations is one of 9,000 studies in the ScholarPulse dataset. Key details — Authors: G. D. Wilk, Robert M. Wallace, J. Anthony; Journal / source: Journal of Applied Physics; Year: 2001.
| Authors | G. D. Wilk, Robert M. Wallace, J. Anthony |
|---|---|
| Journal / source | Journal of Applied Physics |
| Year | 2001 |
| Field | Semiconductor materials and devices |
| Times cited | 5856 |
| Type | article |
| DOI / link | https://doi.org/10.1063/1.1361065 |